AlNxOy thin films deposited by DC reactive magnetron sputtering
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چکیده
منابع مشابه
AlNXOY THIN FILMS DEPOSITED BY DC REACTIVE MAGNETRON SPUTTERING
AlNxOy thin films were produced by DC reactive magnetron sputtering, using an atmosphere of argon and a reactive gas mixture of nitrogen and oxygen, for a wide range of partial pressures of reactive gas. During the deposition, the discharge current was kept constant and the discharge parameters were monitored. The deposition rate, chemical composition, morphology, structure and electrical resis...
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ژورنال
عنوان ژورنال: Applied Surface Science
سال: 2010
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2010.08.076